Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)
| Main Author: | |
|---|---|
| Published: |
University of Birmingham
2008
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.522037 |
| Main Author: | |
|---|---|
| Published: |
University of Birmingham
2008
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.522037 |