Proton Beam Writing : A Novel Tool for Silicon Waveguides Fabrication

Proton Beam Writing : A Novel Tool for Silicon Waveguides Fabrication

Bibliographic Details
Main Author:	Yang, Pengyuan
Published:	University of Surrey 2010
Subjects:	621.381045
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.510377

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