157nm F₂ laser characterization and application to polymer ablation

The work in this thesis focuses on applications and characterization studies of the vacuum ultra-violet (VUV) 157nm F2 laser. The laser ablation properties of various polymeric materials, namely polydimethylsiloxane (PDMS), the photo-resist SU-8, nylon 66, ultra-high molecular weight polyethylene (U...

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Bibliographic Details
Main Author: Zakaria, Rozalina
Other Authors: Dyer, Peter Edward
Published: University of Hull 2009
Subjects:
535
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.507417

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