Development and testing of a micromachined probe card
This thesis is concerned with the design, fabrication and testing of micro scale probes. The probes were designed to act as temporary electrical connections to allow wafer level testing of integrated circuits. The work initially focused on the creation of free standing nickel cantilevers, angled up...
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Durham University
2009
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ndltd-bl.uk-oai-ethos.bl.uk-5007702016-11-18T03:21:20ZDevelopment and testing of a micromachined probe cardRosamond, Mark2009This thesis is concerned with the design, fabrication and testing of micro scale probes. The probes were designed to act as temporary electrical connections to allow wafer level testing of integrated circuits. The work initially focused on the creation of free standing nickel cantilevers, angled up from the substrate with probe tips at the free end. These were fabricated using a novel method, combining pseudo grey scale lithography and thick photoresist sacrificial layers. Detailed analysis of the fabrication method, in particular the resist processing and lithography was undertaken and the limitations of the method explored.621.381548Durham Universityhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.500770http://etheses.dur.ac.uk/1957/Electronic Thesis or Dissertation |
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621.381548 |
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621.381548 Rosamond, Mark Development and testing of a micromachined probe card |
| description |
This thesis is concerned with the design, fabrication and testing of micro scale probes. The probes were designed to act as temporary electrical connections to allow wafer level testing of integrated circuits. The work initially focused on the creation of free standing nickel cantilevers, angled up from the substrate with probe tips at the free end. These were fabricated using a novel method, combining pseudo grey scale lithography and thick photoresist sacrificial layers. Detailed analysis of the fabrication method, in particular the resist processing and lithography was undertaken and the limitations of the method explored. |
| author |
Rosamond, Mark |
| author_facet |
Rosamond, Mark |
| author_sort |
Rosamond, Mark |
| title |
Development and testing of a micromachined probe card |
| title_short |
Development and testing of a micromachined probe card |
| title_full |
Development and testing of a micromachined probe card |
| title_fullStr |
Development and testing of a micromachined probe card |
| title_full_unstemmed |
Development and testing of a micromachined probe card |
| title_sort |
development and testing of a micromachined probe card |
| publisher |
Durham University |
| publishDate |
2009 |
| url |
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.500770 |
| work_keys_str_mv |
AT rosamondmark developmentandtestingofamicromachinedprobecard |
| _version_ |
1718393901109215232 |