Compliant substrates for materials on silicon
This thesis describes the development of processes to fabricate compliant layers for the epitaxy of gallium nitride on silicon. A range of metalorganic chemical vapour deposition processes have been investigated. Three generic materials systems have been explored, namely: a perovskite-based rare ear...
Main Author: | |
---|---|
Published: |
University of Liverpool
2008
|
Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.494119 |