The formation of thin film resistors by ion implantation of metal films

The formation of thin film resistors by ion implantation of metal films

Bibliographic Details
Main Author:	O'Connell, Patrick A.
Published:	University of Surrey 1975
Subjects:	621.3
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.467442

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