The formation of thin film resistors by ion implantation of metal films

Bibliographic Details
Main Author:	O'Connell, Patrick A.
Published:	University of Surrey 1975
Subjects:	621.3
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.467442

id	ndltd-bl.uk-oai-ethos.bl.uk-467442
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-4674422015-03-19T04:32:23ZThe formation of thin film resistors by ion implantation of metal filmsO'Connell, Patrick A.1975621.3University of Surreyhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.467442http://epubs.surrey.ac.uk/804879/Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	621.3
spellingShingle	621.3 O'Connell, Patrick A. The formation of thin film resistors by ion implantation of metal films
author	O'Connell, Patrick A.
author_facet	O'Connell, Patrick A.
author_sort	O'Connell, Patrick A.
title	The formation of thin film resistors by ion implantation of metal films
title_short	The formation of thin film resistors by ion implantation of metal films
title_full	The formation of thin film resistors by ion implantation of metal films
title_fullStr	The formation of thin film resistors by ion implantation of metal films
title_full_unstemmed	The formation of thin film resistors by ion implantation of metal films
title_sort	formation of thin film resistors by ion implantation of metal films
publisher	University of Surrey
publishDate	1975
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.467442
work_keys_str_mv	AT oconnellpatricka theformationofthinfilmresistorsbyionimplantationofmetalfilms AT oconnellpatricka formationofthinfilmresistorsbyionimplantationofmetalfilms
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