A T.E.M. study of the defect structure of ion implanted silicon

A T.E.M. study of the defect structure of ion implanted silicon

Bibliographic Details
Main Author: Lambert, J. A.
Published: University of Birmingham 1978
Subjects:
530.41
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.462631

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.462631

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