An investigation into ion plating mechanisms and parameters
Ion plating is a fairly new and modern technique for obtaining very adhesive films on any kind of surface and substrate material. The development of electron gun evaporation sources created the possibility to deposit, with high rates, materials having high melting points like : Molybdenum, Tungsten...
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University of Salford
1978
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.453409 |