Ion - Beam Methods for Impurity Profiling in Silicon

Bibliographic Details
Main Author:	Allen, C. R.
Published:	University of Oxford 1974
Subjects:	530.0724
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.447488

id	ndltd-bl.uk-oai-ethos.bl.uk-447488
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-4474882017-12-24T15:55:27ZIon - Beam Methods for Impurity Profiling in SiliconAllen, C. R.1974530.0724University of Oxfordhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.447488Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	530.0724
spellingShingle	530.0724 Allen, C. R. Ion - Beam Methods for Impurity Profiling in Silicon
author	Allen, C. R.
author_facet	Allen, C. R.
author_sort	Allen, C. R.
title	Ion - Beam Methods for Impurity Profiling in Silicon
title_short	Ion - Beam Methods for Impurity Profiling in Silicon
title_full	Ion - Beam Methods for Impurity Profiling in Silicon
title_fullStr	Ion - Beam Methods for Impurity Profiling in Silicon
title_full_unstemmed	Ion - Beam Methods for Impurity Profiling in Silicon
title_sort	ion - beam methods for impurity profiling in silicon
publisher	University of Oxford
publishDate	1974
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.447488
work_keys_str_mv	AT allencr ionbeammethodsforimpurityprofilinginsilicon
_version_	1718571694804697088

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