Fabrication of vertical MOSFETs with reduced parasitics and incorporating a dielectric pocket

Fabrication of vertical MOSFETs with reduced parasitics and incorporating a dielectric pocket

Bibliographic Details
Main Author:	Gili, Enrico
Published:	University of Southampton 2006
Subjects:	621.38152
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.436946

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