Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation

Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation

Bibliographic Details
Main Author: El Mubarek, Huda Abdel Wahab Abdel Rahim
Published: University of Southampton 2004
Subjects:
621.38152
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.419196
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spelling ndltd-bl.uk-oai-ethos.bl.uk-4191962015-03-19T08:40:56ZSuppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantationEl Mubarek, Huda Abdel Wahab Abdel Rahim2004621.38152University of Southamptonhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.419196Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 621.38152
spellingShingle 621.38152
El Mubarek, Huda Abdel Wahab Abdel Rahim
Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
author El Mubarek, Huda Abdel Wahab Abdel Rahim
author_facet El Mubarek, Huda Abdel Wahab Abdel Rahim
author_sort El Mubarek, Huda Abdel Wahab Abdel Rahim
title Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
title_short Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
title_full Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
title_fullStr Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
title_full_unstemmed Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
title_sort suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
publisher University of Southampton
publishDate 2004
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.419196
work_keys_str_mv AT elmubarekhudaabdelwahababdelrahim suppressionofborontransientenhancedandthermaldiffusioninsiliconandsilicongermaniumbyfluorineimplantation
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