Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques

Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques

Bibliographic Details
Main Author:	Gay, Diane Lorraine
Published:	Queen's University Belfast 1997
Subjects:	541 Physical chemistry
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.388096

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