Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques

Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques

Bibliographic Details
Main Author: Gay, Diane Lorraine
Published: Queen's University Belfast 1997
Subjects:
541
Physical chemistry
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.388096
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spelling ndltd-bl.uk-oai-ethos.bl.uk-3880962015-03-19T05:50:43ZSilicon on insulator fabrication using silicon germanium etch stop and polish stop techniquesGay, Diane Lorraine1997541Physical chemistryQueen's University Belfasthttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.388096Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 541
Physical chemistry
spellingShingle 541
Physical chemistry
Gay, Diane Lorraine
Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques
author Gay, Diane Lorraine
author_facet Gay, Diane Lorraine
author_sort Gay, Diane Lorraine
title Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques
title_short Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques
title_full Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques
title_fullStr Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques
title_full_unstemmed Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques
title_sort silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques
publisher Queen's University Belfast
publishDate 1997
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.388096
work_keys_str_mv AT gaydianelorraine silicononinsulatorfabricationusingsilicongermaniumetchstopandpolishstoptechniques
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