A study of the cause of residual stresses in sputtered films
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University of Cambridge
1995
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.387735 |
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ndltd-bl.uk-oai-ethos.bl.uk-387735 |
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ndltd-bl.uk-oai-ethos.bl.uk-3877352015-03-19T09:47:34ZA study of the cause of residual stresses in sputtered filmsHudson, Craig1995530.41Solid-state physicsUniversity of Cambridgehttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.387735Electronic Thesis or Dissertation |
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NDLTD |
| sources |
NDLTD |
| topic |
530.41 Solid-state physics |
| spellingShingle |
530.41 Solid-state physics Hudson, Craig A study of the cause of residual stresses in sputtered films |
| author |
Hudson, Craig |
| author_facet |
Hudson, Craig |
| author_sort |
Hudson, Craig |
| title |
A study of the cause of residual stresses in sputtered films |
| title_short |
A study of the cause of residual stresses in sputtered films |
| title_full |
A study of the cause of residual stresses in sputtered films |
| title_fullStr |
A study of the cause of residual stresses in sputtered films |
| title_full_unstemmed |
A study of the cause of residual stresses in sputtered films |
| title_sort |
study of the cause of residual stresses in sputtered films |
| publisher |
University of Cambridge |
| publishDate |
1995 |
| url |
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.387735 |
| work_keys_str_mv |
AT hudsoncraig astudyofthecauseofresidualstressesinsputteredfilms AT hudsoncraig studyofthecauseofresidualstressesinsputteredfilms |
| _version_ |
1716771395728310272 |