The application of Fresnel contrast analysis to multilayer structure characterisation

Bibliographic Details
Main Author: Shih, Wong-Cheng
Published: University of Cambridge 1991
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.386239
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record_format oai_dc
spelling ndltd-bl.uk-oai-ethos.bl.uk-3862392015-03-19T09:33:28ZThe application of Fresnel contrast analysis to multilayer structure characterisationShih, Wong-Cheng1991530.41Solid-state physicsUniversity of Cambridgehttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.386239Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 530.41
Solid-state physics
spellingShingle 530.41
Solid-state physics
Shih, Wong-Cheng
The application of Fresnel contrast analysis to multilayer structure characterisation
author Shih, Wong-Cheng
author_facet Shih, Wong-Cheng
author_sort Shih, Wong-Cheng
title The application of Fresnel contrast analysis to multilayer structure characterisation
title_short The application of Fresnel contrast analysis to multilayer structure characterisation
title_full The application of Fresnel contrast analysis to multilayer structure characterisation
title_fullStr The application of Fresnel contrast analysis to multilayer structure characterisation
title_full_unstemmed The application of Fresnel contrast analysis to multilayer structure characterisation
title_sort application of fresnel contrast analysis to multilayer structure characterisation
publisher University of Cambridge
publishDate 1991
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.386239
work_keys_str_mv AT shihwongcheng theapplicationoffresnelcontrastanalysistomultilayerstructurecharacterisation
AT shihwongcheng applicationoffresnelcontrastanalysistomultilayerstructurecharacterisation
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