A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films

A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films

Bibliographic Details
Main Author:	Awang Mat, A. F.
Published:	University of Reading 1988
Subjects:	530.41 Solid-state physics
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380853

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