Characterisation and performance of optical lithography systems

Bibliographic Details
Main Author:	Maxwell, Graeme Dunlop
Published:	University of Edinburgh 1987
Subjects:	770 Lithographic use in IC
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380429

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record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-3804292016-06-21T03:22:27ZCharacterisation and performance of optical lithography systemsMaxwell, Graeme Dunlop1987770Lithographic use in ICUniversity of Edinburghhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380429http://hdl.handle.net/1842/15296Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	770 Lithographic use in IC
spellingShingle	770 Lithographic use in IC Maxwell, Graeme Dunlop Characterisation and performance of optical lithography systems
author	Maxwell, Graeme Dunlop
author_facet	Maxwell, Graeme Dunlop
author_sort	Maxwell, Graeme Dunlop
title	Characterisation and performance of optical lithography systems
title_short	Characterisation and performance of optical lithography systems
title_full	Characterisation and performance of optical lithography systems
title_fullStr	Characterisation and performance of optical lithography systems
title_full_unstemmed	Characterisation and performance of optical lithography systems
title_sort	characterisation and performance of optical lithography systems
publisher	University of Edinburgh
publishDate	1987
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380429
work_keys_str_mv	AT maxwellgraemedunlop characterisationandperformanceofopticallithographysystems
_version_	1718312533322891264

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