Electron microscopy of VLSI MOS devices

Bibliographic Details
Main Author:	Roberts, M. C.
Published:	University of Oxford 1985
Subjects:	541 Physical chemistry
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.370297

id	ndltd-bl.uk-oai-ethos.bl.uk-370297
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-3702972015-03-19T10:59:19ZElectron microscopy of VLSI MOS devicesRoberts, M. C.1985541Physical chemistryUniversity of Oxfordhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.370297Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	541 Physical chemistry
spellingShingle	541 Physical chemistry Roberts, M. C. Electron microscopy of VLSI MOS devices
author	Roberts, M. C.
author_facet	Roberts, M. C.
author_sort	Roberts, M. C.
title	Electron microscopy of VLSI MOS devices
title_short	Electron microscopy of VLSI MOS devices
title_full	Electron microscopy of VLSI MOS devices
title_fullStr	Electron microscopy of VLSI MOS devices
title_full_unstemmed	Electron microscopy of VLSI MOS devices
title_sort	electron microscopy of vlsi mos devices
publisher	University of Oxford
publishDate	1985
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.370297
work_keys_str_mv	AT robertsmc electronmicroscopyofvlsimosdevices
_version_	1716778304612073472

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