Electron energy distribution functions in radio-frequency discharges

Electron energy distribution functions in radio-frequency discharges

Bibliographic Details
Main Author:	Farahat, Sameer Ismail
Published:	University of Oxford 1997
Subjects:	530.44 Electrical discharges in gases
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.361940

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