Electron energy distribution functions in radio-frequency discharges

Bibliographic Details
Main Author:	Farahat, Sameer Ismail
Published:	University of Oxford 1997
Subjects:	530.44 Electrical discharges in gases
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.361940

id	ndltd-bl.uk-oai-ethos.bl.uk-361940
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-3619402015-03-19T10:55:09ZElectron energy distribution functions in radio-frequency dischargesFarahat, Sameer Ismail1997530.44Electrical discharges in gasesUniversity of Oxfordhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.361940Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	530.44 Electrical discharges in gases
spellingShingle	530.44 Electrical discharges in gases Farahat, Sameer Ismail Electron energy distribution functions in radio-frequency discharges
author	Farahat, Sameer Ismail
author_facet	Farahat, Sameer Ismail
author_sort	Farahat, Sameer Ismail
title	Electron energy distribution functions in radio-frequency discharges
title_short	Electron energy distribution functions in radio-frequency discharges
title_full	Electron energy distribution functions in radio-frequency discharges
title_fullStr	Electron energy distribution functions in radio-frequency discharges
title_full_unstemmed	Electron energy distribution functions in radio-frequency discharges
title_sort	electron energy distribution functions in radio-frequency discharges
publisher	University of Oxford
publishDate	1997
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.361940
work_keys_str_mv	AT farahatsameerismail electronenergydistributionfunctionsinradiofrequencydischarges
_version_	1716778271343902720

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