The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon

Bibliographic Details
Main Author:	Altrip, John L.
Published:	University of Southampton 1992
Subjects:	530.41 Solid-state physics
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.358994

id	ndltd-bl.uk-oai-ethos.bl.uk-358994
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-3589942015-03-19T08:46:52ZThe diffusion and electrical activation of rapid thermally annealed arsenic implanted siliconAltrip, John L.1992530.41Solid-state physicsUniversity of Southamptonhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.358994Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	530.41 Solid-state physics
spellingShingle	530.41 Solid-state physics Altrip, John L. The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
author	Altrip, John L.
author_facet	Altrip, John L.
author_sort	Altrip, John L.
title	The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
title_short	The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
title_full	The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
title_fullStr	The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
title_full_unstemmed	The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
title_sort	diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
publisher	University of Southampton
publishDate	1992
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.358994
work_keys_str_mv	AT altripjohnl thediffusionandelectricalactivationofrapidthermallyannealedarsenicimplantedsilicon AT altripjohnl diffusionandelectricalactivationofrapidthermallyannealedarsenicimplantedsilicon
_version_	1716766909906550784

The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon

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