The study of the dissolution and solubility kinetics of thin polymer films for resist materials

The study of the dissolution and solubility kinetics of thin polymer films for resist materials

Bibliographic Details
Main Author:	Buley, Jill Marie
Published:	University of Bath 1993
Subjects:	541 Physical chemistry
Online Access:	https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.358772

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