The study of the dissolution and solubility kinetics of thin polymer films for resist materials

The study of the dissolution and solubility kinetics of thin polymer films for resist materials

Bibliographic Details
Main Author: Buley, Jill Marie
Published: University of Bath 1993
Subjects:
541
Physical chemistry
Online Access:https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.358772
id ndltd-bl.uk-oai-ethos.bl.uk-358772
record_format oai_dc
spelling ndltd-bl.uk-oai-ethos.bl.uk-3587722019-01-04T03:22:28ZThe study of the dissolution and solubility kinetics of thin polymer films for resist materialsBuley, Jill Marie1993541Physical chemistryUniversity of Bathhttps://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.358772Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 541
Physical chemistry
spellingShingle 541
Physical chemistry
Buley, Jill Marie
The study of the dissolution and solubility kinetics of thin polymer films for resist materials
author Buley, Jill Marie
author_facet Buley, Jill Marie
author_sort Buley, Jill Marie
title The study of the dissolution and solubility kinetics of thin polymer films for resist materials
title_short The study of the dissolution and solubility kinetics of thin polymer films for resist materials
title_full The study of the dissolution and solubility kinetics of thin polymer films for resist materials
title_fullStr The study of the dissolution and solubility kinetics of thin polymer films for resist materials
title_full_unstemmed The study of the dissolution and solubility kinetics of thin polymer films for resist materials
title_sort study of the dissolution and solubility kinetics of thin polymer films for resist materials
publisher University of Bath
publishDate 1993
url https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.358772
work_keys_str_mv AT buleyjillmarie thestudyofthedissolutionandsolubilitykineticsofthinpolymerfilmsforresistmaterials
AT buleyjillmarie studyofthedissolutionandsolubilitykineticsofthinpolymerfilmsforresistmaterials
_version_ 1718806113997029376

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