Rapid thermal CVD of epitaxial silicon from dichlorosilane source

Rapid thermal CVD of epitaxial silicon from dichlorosilane source

Bibliographic Details
Main Author:	Ye, Liang
Published:	Queen's University Belfast 1993
Subjects:	621.31042 Chemical Vapour Deposition
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.333849

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