Nanometer-scale electron beam lithography over large areas

Nanometer-scale electron beam lithography over large areas

Bibliographic Details
Main Author: Chen, Zhong Wei
Published: University of Cambridge 1989
Subjects:
530.41
Solid-state physics
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.317706

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.317706

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