Intramolecular exciplexes and the radiation-induced crosslinking of resists based on chlorinated polystyrene derivatives

Intramolecular exciplexes and the radiation-induced crosslinking of resists based on chlorinated polystyrene derivatives

Bibliographic Details
Main Author:	Miller Tate, Philip C.
Published:	University of Kent 1992
Subjects:	547 Atomic radiation and polymers
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.303899

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