A study of instabilities in electronegative RF-driven discharges

A study of instabilities in electronegative RF-driven discharges

Bibliographic Details
Main Author:	Corr, C. S.
Published:	Queen's University Belfast 2003
Subjects:	530 Radio frequency
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.273197

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