A study of instabilities in electronegative RF-driven discharges

Bibliographic Details
Main Author: Corr, C. S.
Published: Queen's University Belfast 2003
Subjects:
530
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.273197
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spelling ndltd-bl.uk-oai-ethos.bl.uk-2731972015-03-19T05:43:10ZA study of instabilities in electronegative RF-driven dischargesCorr, C. S.2003530Radio frequencyQueen's University Belfasthttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.273197Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 530
Radio frequency
spellingShingle 530
Radio frequency
Corr, C. S.
A study of instabilities in electronegative RF-driven discharges
author Corr, C. S.
author_facet Corr, C. S.
author_sort Corr, C. S.
title A study of instabilities in electronegative RF-driven discharges
title_short A study of instabilities in electronegative RF-driven discharges
title_full A study of instabilities in electronegative RF-driven discharges
title_fullStr A study of instabilities in electronegative RF-driven discharges
title_full_unstemmed A study of instabilities in electronegative RF-driven discharges
title_sort study of instabilities in electronegative rf-driven discharges
publisher Queen's University Belfast
publishDate 2003
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.273197
work_keys_str_mv AT corrcs astudyofinstabilitiesinelectronegativerfdrivendischarges
AT corrcs studyofinstabilitiesinelectronegativerfdrivendischarges
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