Stress in ion-beam assisted silicon dioxide and tantalum pentoxide thin films

Stress in ion-beam assisted silicon dioxide and tantalum pentoxide thin films

Bibliographic Details
Main Author:	Sirotkina, Natalia
Published:	University of Salford 2003
Subjects:	530 Solid-state physics
Online Access:	https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.272625

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