Stress in ion-beam assisted silicon dioxide and tantalum pentoxide thin films
Main Author: | |
---|---|
Published: |
University of Salford
2003
|
Subjects: | |
Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.272625 |
Main Author: | |
---|---|
Published: |
University of Salford
2003
|
Subjects: | |
Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.272625 |