The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas

The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas

Bibliographic Details
Main Author: Mahony, Charles Michael Oliver
Published: University of Ulster 2003
Subjects:
621
Plasma engineering
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.272339
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spelling ndltd-bl.uk-oai-ethos.bl.uk-2723392015-03-19T08:13:20ZThe development of advanced measurement techniques for the characterisation of low pressure technological processing plasmasMahony, Charles Michael Oliver2003621Plasma engineeringUniversity of Ulsterhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.272339Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 621
Plasma engineering
spellingShingle 621
Plasma engineering
Mahony, Charles Michael Oliver
The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas
author Mahony, Charles Michael Oliver
author_facet Mahony, Charles Michael Oliver
author_sort Mahony, Charles Michael Oliver
title The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas
title_short The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas
title_full The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas
title_fullStr The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas
title_full_unstemmed The development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas
title_sort development of advanced measurement techniques for the characterisation of low pressure technological processing plasmas
publisher University of Ulster
publishDate 2003
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.272339
work_keys_str_mv AT mahonycharlesmichaeloliver thedevelopmentofadvancedmeasurementtechniquesforthecharacterisationoflowpressuretechnologicalprocessingplasmas
AT mahonycharlesmichaeloliver developmentofadvancedmeasurementtechniquesforthecharacterisationoflowpressuretechnologicalprocessingplasmas
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