Diagnostics and modelling of an inductively coupled RF low-pressure low-temperature plasma
This thesis is a theoretical model and experimental study of the physics of a low pressure (5-50 mtorr), low electron temperature (1-10 eV), high density (J017 _J01Bm-J ) inductively coupled plasma. This type of plasma is similar to those much used in plasma etching, deposition, and other plasma aid...
| Main Author: | |
|---|---|
| Published: |
Open University
1998
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.262762 |