Ion bombardment induced damage and annealing in Si

Ion bombardment induced damage and annealing in Si

Bibliographic Details
Main Author: Zeroual, Boudjemaa
Published: University of Salford 1990
Subjects:
530.41
Semiconductor doping
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.258251
Description
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