Surface studies on semiconductor processing and related phenomena

Bibliographic Details
Main Author:	Murrell, Adrian J.
Published:	University of Oxford 1990
Subjects:	530.41 Microelectronics[Integrated circuits]
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.258010

id	ndltd-bl.uk-oai-ethos.bl.uk-258010
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-2580102015-03-19T10:55:51ZSurface studies on semiconductor processing and related phenomenaMurrell, Adrian J.1990530.41Microelectronics[Integrated circuits]University of Oxfordhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.258010Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	530.41 Microelectronics[Integrated circuits]
spellingShingle	530.41 Microelectronics[Integrated circuits] Murrell, Adrian J. Surface studies on semiconductor processing and related phenomena
author	Murrell, Adrian J.
author_facet	Murrell, Adrian J.
author_sort	Murrell, Adrian J.
title	Surface studies on semiconductor processing and related phenomena
title_short	Surface studies on semiconductor processing and related phenomena
title_full	Surface studies on semiconductor processing and related phenomena
title_fullStr	Surface studies on semiconductor processing and related phenomena
title_full_unstemmed	Surface studies on semiconductor processing and related phenomena
title_sort	surface studies on semiconductor processing and related phenomena
publisher	University of Oxford
publishDate	1990
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.258010
work_keys_str_mv	AT murrelladrianj surfacestudiesonsemiconductorprocessingandrelatedphenomena
_version_	1716777865778823168

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