Optical monitoring of surface processes relevant to thin film growth by chemical vapour deposition

Optical monitoring of surface processes relevant to thin film growth by chemical vapour deposition

Bibliographic Details
Main Author:	Simcock, Michael Neil
Published:	University of Salford 2002
Subjects:	530 Oxidation
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.249006

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