The production of porous and chemically reactive coatings by magnetron sputtering

The production of porous and chemically reactive coatings by magnetron sputtering

Bibliographic Details
Main Author:	O'Brien, Janet
Published:	University of Salford 1998
Subjects:	667.9 Thin film materials
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244932

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