The synthesis of functionalized polysilanes for microlithographic applications

The synthesis of functionalized polysilanes for microlithographic applications

Bibliographic Details
Main Author: Webb, Samantha Jane
Published: University of Kent 1994
Subjects:
547
Organometallic polymers
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.240671
id ndltd-bl.uk-oai-ethos.bl.uk-240671
record_format oai_dc
spelling ndltd-bl.uk-oai-ethos.bl.uk-2406712015-03-19T06:17:44ZThe synthesis of functionalized polysilanes for microlithographic applicationsWebb, Samantha Jane1994547Organometallic polymersUniversity of Kenthttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.240671Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 547
Organometallic polymers
spellingShingle 547
Organometallic polymers
Webb, Samantha Jane
The synthesis of functionalized polysilanes for microlithographic applications
author Webb, Samantha Jane
author_facet Webb, Samantha Jane
author_sort Webb, Samantha Jane
title The synthesis of functionalized polysilanes for microlithographic applications
title_short The synthesis of functionalized polysilanes for microlithographic applications
title_full The synthesis of functionalized polysilanes for microlithographic applications
title_fullStr The synthesis of functionalized polysilanes for microlithographic applications
title_full_unstemmed The synthesis of functionalized polysilanes for microlithographic applications
title_sort synthesis of functionalized polysilanes for microlithographic applications
publisher University of Kent
publishDate 1994
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.240671
work_keys_str_mv AT webbsamanthajane thesynthesisoffunctionalizedpolysilanesformicrolithographicapplications
AT webbsamanthajane synthesisoffunctionalizedpolysilanesformicrolithographicapplications
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