Dry etching of silicon based semiconductor materials : plasma diagnostics and reaction mechanics

Dry etching of silicon based semiconductor materials : plasma diagnostics and reaction mechanics

Bibliographic Details
Main Author:	Dartnell, Nicholas John
Published:	University of Southampton 1993
Subjects:	541 Physical chemistry
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.239655

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