Nitride formation at silicon surfaces

Bibliographic Details
Main Author:	Knight, Patrick J.
Published:	University of Southampton 1992
Subjects:	541 Thin films
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.238903

id	ndltd-bl.uk-oai-ethos.bl.uk-238903
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-2389032015-03-19T08:45:34ZNitride formation at silicon surfacesKnight, Patrick J.1992541Thin filmsUniversity of Southamptonhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.238903Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	541 Thin films
spellingShingle	541 Thin films Knight, Patrick J. Nitride formation at silicon surfaces
author	Knight, Patrick J.
author_facet	Knight, Patrick J.
author_sort	Knight, Patrick J.
title	Nitride formation at silicon surfaces
title_short	Nitride formation at silicon surfaces
title_full	Nitride formation at silicon surfaces
title_fullStr	Nitride formation at silicon surfaces
title_full_unstemmed	Nitride formation at silicon surfaces
title_sort	nitride formation at silicon surfaces
publisher	University of Southampton
publishDate	1992
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.238903
work_keys_str_mv	AT knightpatrickj nitrideformationatsiliconsurfaces
_version_	1716765470842945536

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