Semiconductor Yield Modeling Using Generalized Linear Models
abstract: Yield is a key process performance characteristic in the capital-intensive semiconductor fabrication process. In an industry where machines cost millions of dollars and cycle times are a number of months, predicting and optimizing yield are critical to process improvement, customer satisf...
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| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
2011
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| Online Access: | http://hdl.handle.net/2286/R.I.8909 |