Development of Nanosphere Lithography Technique with Enhanced Lithographical Accuracy on Periodic Si Nanostructure for Thin Si Solar Cell Application

abstract: In this thesis, a novel silica nanosphere (SNS) lithography technique has been developed to offer a fast, cost-effective, and large area applicable nano-lithography approach. The SNS can be easily deposited with a simple spin-coating process after introducing a N,N-dimethyl-formamide (DMF)...

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Bibliographic Details
Other Authors: Choi, Jeayoung (Author)
Format: Doctoral Thesis
Language:English
Published: 2015
Subjects:
Online Access:http://hdl.handle.net/2286/R.I.29713