Development of Nanosphere Lithography Technique with Enhanced Lithographical Accuracy on Periodic Si Nanostructure for Thin Si Solar Cell Application
abstract: In this thesis, a novel silica nanosphere (SNS) lithography technique has been developed to offer a fast, cost-effective, and large area applicable nano-lithography approach. The SNS can be easily deposited with a simple spin-coating process after introducing a N,N-dimethyl-formamide (DMF)...
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Format: | Doctoral Thesis |
Language: | English |
Published: |
2015
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Online Access: | http://hdl.handle.net/2286/R.I.29713 |