Studies of Singly and Multiply Charged Secondary Ion Emission And The Effects Of Oxygen On Ionization And Sputter Erosion
abstract: Mass spectrometric analysis requires that atoms from the sample be ionized in the gas phase. Secondary ion mass spectrometry achieves this by sputtering samples with an energetic primary ion beam. Several investigations of the sputtering and ionization process have been conducted. Oxygen i...
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| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
2012
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| Online Access: | http://hdl.handle.net/2286/R.I.15214 |