Use of a Quartz Crystal Microbalance with Dissipation Monitoring to Study Adsorption Phenomena Relevant to Semiconductor Wet Processing
In silicon processing, contamination control is very important in each of the processing steps to ensure device reliability and enhance yield. There are many different types of contamination that are introduced at different processing steps from different sources. Industrial practice regarding conta...
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| Language: | en_US |
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The University of Arizona.
2017
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| Online Access: | http://hdl.handle.net/10150/626160 http://arizona.openrepository.com/arizona/handle/10150/626160 |