Reducing Ultra-High-Purity (UHP) Gas Consumption by Characterization of Trace Contaminant Kinetic and Transport Behavior in UHP Fabrication Environments
Trends show that the fraction of the world's population with electronic devices using modern integrated circuits is increasing at a rapid rate. To meet consumer demands: less expensive, faster, and smaller electronics; while still making a profit, manufacturers must shrink transistor dimensions...
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| Language: | en_US |
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The University of Arizona.
2014
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| Online Access: | http://hdl.handle.net/10150/321322 |