AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS

AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS

Bibliographic Details
Main Author:	Shevlin, Craig Martin, 1943-
Language:	en_US
Published:	The University of Arizona. 1978
Subjects:	Semiconductor doping. Ion implantation. Semiconductors > Effect of radiation on.
Online Access:	http://hdl.handle.net/10150/298441

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