AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS

AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS

Bibliographic Details
Main Author: Shevlin, Craig Martin, 1943-
Language:en_US
Published: The University of Arizona. 1978
Subjects:
Semiconductor doping.
Ion implantation.
Semiconductors > Effect of radiation on.
Online Access:http://hdl.handle.net/10150/298441
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spelling ndltd-arizona.edu-oai-arizona.openrepository.com-10150-2984412015-10-23T05:21:26Z AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS Shevlin, Craig Martin, 1943- Semiconductor doping. Ion implantation. Semiconductors -- Effect of radiation on. 1978 text Dissertation-Reproduction (electronic) http://hdl.handle.net/10150/298441 6411083 7906412 .b12988510 en_US Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. The University of Arizona.
collection NDLTD
language en_US
sources NDLTD
topic Semiconductor doping.
Ion implantation.
Semiconductors -- Effect of radiation on.
spellingShingle Semiconductor doping.
Ion implantation.
Semiconductors -- Effect of radiation on.
Shevlin, Craig Martin, 1943-
AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
author Shevlin, Craig Martin, 1943-
author_facet Shevlin, Craig Martin, 1943-
author_sort Shevlin, Craig Martin, 1943-
title AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
title_short AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
title_full AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
title_fullStr AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
title_full_unstemmed AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
title_sort electron microscope investigation of ion-implanted silicon containing pre-induced stacking faults
publisher The University of Arizona.
publishDate 1978
url http://hdl.handle.net/10150/298441
work_keys_str_mv AT shevlincraigmartin1943 anelectronmicroscopeinvestigationofionimplantedsiliconcontainingpreinducedstackingfaults
AT shevlincraigmartin1943 electronmicroscopeinvestigationofionimplantedsiliconcontainingpreinducedstackingfaults
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