Sintering of aluminum-nitride in a microwave induced plasma
The sintering of aluminum nitride in a microwave induced plasma was investigated. The plasma furnace consisted of a quartz tube inserted into a waveguide connected to a 2450 MHz microwave generator. After evacuating the tube to about 1.33 mbar, nitrogen gas was introduced, generating a steady plasma...
| Main Author: | |
|---|---|
| Other Authors: | |
| Language: | en_US |
| Published: |
The University of Arizona.
1988
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10150/276877 http://arizona.openrepository.com/arizona/handle/10150/276877 |