MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.

Bibliographic Details
Main Author:	Chen, Shallop Joan-In.
Language:	en_US
Published:	The University of Arizona. 1985
Subjects:	Microwave heating. Semiconductor films. Photoresists. maps
Online Access:	http://hdl.handle.net/10150/275256 http://arizona.openrepository.com/arizona/handle/10150/275256

id	ndltd-arizona.edu-oai-arizona.openrepository.com-10150-275256
record_format	oai_dc
spelling	ndltd-arizona.edu-oai-arizona.openrepository.com-10150-2752562016-10-19T15:01:48Z MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE. Chen, Shallop Joan-In. Chen, Shallop Joan-In. Microwave heating. Semiconductor films. Photoresists. maps 1985 text Thesis-Reproduction (electronic) maps http://hdl.handle.net/10150/275256 http://arizona.openrepository.com/arizona/handle/10150/275256 13496252 1325258 .b15480550 en_US Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. The University of Arizona.
collection	NDLTD
language	en_US
sources	NDLTD
topic	Microwave heating. Semiconductor films. Photoresists. maps
spellingShingle	Microwave heating. Semiconductor films. Photoresists. maps Chen, Shallop Joan-In. Chen, Shallop Joan-In. MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.
author	Chen, Shallop Joan-In. Chen, Shallop Joan-In.
author_facet	Chen, Shallop Joan-In. Chen, Shallop Joan-In.
author_sort	Chen, Shallop Joan-In.
title	MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.
title_short	MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.
title_full	MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.
title_fullStr	MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.
title_full_unstemmed	MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.
title_sort	microwave curing for today's semiconductor manufacturing and mos circuit performance.
publisher	The University of Arizona.
publishDate	1985
url	http://hdl.handle.net/10150/275256 http://arizona.openrepository.com/arizona/handle/10150/275256
work_keys_str_mv	AT chenshallopjoanin microwavecuringfortodayssemiconductormanufacturingandmoscircuitperformance AT chenshallopjoanin microwavecuringfortodayssemiconductormanufacturingandmoscircuitperformance
_version_	1718387362147336192

MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.

Similar Items