ERROR ANALYSIS AND DATA REDUCTION FOR INTERFEROMETRIC SURFACE MEASUREMENTS
High-precision optical systems are generally tested using interferometry, since it often is the only way to achieve the desired measurement precision and accuracy. Interferometers can generally measure a surface to an accuracy of one hundredth of a wave. In order to achieve an accuracy to the next...
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| Language: | EN |
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The University of Arizona.
2009
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| Online Access: | http://hdl.handle.net/10150/195309 |